Calculation of surface binding energies by computer simulation of the sputtering process
Sputtering of monocrystalline copper, a face-centered cubic, was investigated by computer simulation techniques using the Born-Mayer potential . Normally incident argon ions were shot into the (111), (110), and (100) orientations at various energies. Qualitatively correct deposit patterns wer...
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| Diğer Yazarlar: | |
| Materyal Türü: | Tez |
| Dil: | en_US |
| Baskı/Yayın Bilgisi: |
May
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| Online Erişim: | https://hdl.handle.net/10945/9453 |
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