Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III :
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boca Raton, Florida ; London, [England] ; New York :
CRC Press,
2011.
|
| Edition: | Third edition. |
| Subjects: | |
| Online Access: | Click to View |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|