Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications /
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| Other Authors: | , , |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Sharjah, United Arab Emirates ; Oak Park, Illinois :
Bentham Science Publishers,
[2013]
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| Subjects: | |
| Online Access: | Click to View |
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