Handbook of silicon based MEMS materials and technologies
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
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| Edition: | 1st ed. |
| Series: | Micro & nano technologies.
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| Subjects: | |
| Online Access: | Click to View |
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