Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
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| Series: | Nanotechnology science and technology series.
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| Subjects: | |
| Online Access: | Click to View |
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