Resonant MEMS : fundamentals, implementation and application /

Saved in:

Bibliographic Details
Other Authors:	Brand, Oliver (Editor)
Format:	Electronic eBook
Language:	English
Published:	Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, 2015.
Series:	Advanced micro & nanosystems.
Subjects:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Online Access:	Click to View
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

Click to View