Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /

Saved in:

Bibliographic Details
Corporate Author:	International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels, Belgium
Other Authors:	Mertens, Paul (Editor), Meuris, Marc (Editor), Heyns, Marc (Editor)
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Pfaffikon, Switzerland : TTP, 2014.
Series:	Diffusion and defect data. Solid state phenomena ; Volume 219.
Subjects:	Semiconductors > Congresses. Electronic books.
Online Access:	Click to View
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

Click to View