Handbook of cleaning for semiconductor manufacturing fundamentals and applications /
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Salem, Mass. ; Scrivener ; Hoboken, N.J. :
John Wiley & Sons, Inc.,
c2011.
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| Subjects: | |
| Online Access: | Click to View |
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| Physical Description: | xxii, 590 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781118071731 |