Materials science of thin films deposition and structure /
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
San Diego, CA :
Academic Press,
2002.
|
| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Click to View |
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| 008 | 010328s2002 caua ob 001 0 eng | ||
| 020 | |a 9780080491783 |q (electronic bk.) | ||
| 020 | |z 9780125249751 |q (print) | ||
| 035 | |a (MiAaPQ)EBC294629 | ||
| 035 | |a (Au-PeEL)EBL294629 | ||
| 035 | |a (CaPaEBR)ebr10172820 | ||
| 035 | |a (CaONFJC)MIL102003 | ||
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| 050 | 4 | |a TA418.9.T45 |b O47 2002 | |
| 082 | 0 | |a 621.3815/2 |2 22 | |
| 100 | 1 | |a Ohring, Milton, |d 1936- | |
| 245 | 1 | 0 | |a Materials science of thin films |h [electronic resource] : |b deposition and structure / |c Milton Ohring. |
| 250 | |a 2nd ed. | ||
| 260 | |a San Diego, CA : |b Academic Press, |c 2002. | ||
| 300 | |a xxi, 794 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Thin films. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/kaiptc/detail.action?docID=294629 |z Click to View |
| 942 | |c PQEBOOK | ||
| 999 | |c 19555 |d 19555 | ||