Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK /
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| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Durnten-Zurich, Switzerland :
Trans Tech Publications,
[2014]
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| Series: | Diffusion and defect data. Solid state phenomena ;
v. 205-206. |
| Subjects: | |
| Online Access: | Click to View |
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